Micro-Opto-Electro-Mechanical Systems

（重定向自MOEMS）

This Figure first was introduced by M. Edward Motamedi

Diagram of a Digital micromirror showing the mirror mounted on the suspended yoke with the torsion spring running bottom left to top right (light grey), with the electrostatic pads of the memory cells below (top left and bottom right)

DLP CINEMA. A Texas Instruments Technology

Micro-Opto-Electro-Mechanical Systems (MOEMS) are not a special class of Micro-Electro-Mechanical Systems (MEMS) but rather the combination of MEMS merged with Micro-optics; this involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems. MOEMS includes a wide variety of devices including optical switch, optical cross-connect, tunable VCSEL, microbolometers amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.

词汇	MOEMS
分类	英语词汇英语翻译词典
释义	MOEMS 英语百科 Micro-Opto-Electro-Mechanical Systems （重定向自MOEMS） Micro-Opto-Electro-Mechanical Systems (MOEMS) are not a special class of Micro-Electro-Mechanical Systems (MEMS) but rather the combination of MEMS merged with Micro-optics; this involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems. MOEMS includes a wide variety of devices including optical switch, optical cross-connect, tunable VCSEL, microbolometers amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.
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