SONOS，是硅-氧化物-氮化物-氧化物-硅（英语：Silicon-Oxide-Nitride-Oxide-Silicon）的英语首字母缩写，是一种和闪存联系较为紧密的非易失性存储器。它与主流的闪存主要区别在于，它使用了氮化硅（Si₃N₄），而不是多晶硅，来充当存储材料。它的一个分支是SHINOS（硅-高电介质-氮化物-氧化物-硅）。SONOS允许比多晶硅闪存更低的编程电压和更高的编程-擦除循环次数，是一个较为活跃的研究、开发热点。提供基于SONOS产品的公司包括GlobalFoundries、Cypress Semiconductor、Macronix、东芝、联华电子、华虹微电子。

SONOS, short for "Silicon-Oxide-Nitride-Oxide-Silicon", is a type of non-volatile computer memory closely related to Flash RAM. It is one of Charge trap flash variants. It is distinguished from mainstream flash by the use of silicon nitride (Si₃N₄) instead of polysilicon for the charge storage material. A further variant is "SHINOS" ("Silicon Hi-k Nitride Oxide Silicon"). SONOS promises lower programming voltages and higher program/erase cycle endurance than polysilicon-based flash, and is an area of active research and development effort. Companies offering SONOS-based products include GlobalFoundries, Cypress Semiconductor, Macronix, Toshiba, and United Microelectronics Corporation.