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词汇 SIMOX
分类 英语词汇 英语翻译词典
释义

SIMOX

中文百科

离子注入 Ion implantation

(重定向自SIMOX)
一离子注入系统
Esquema del proceso de implantación de iones con separador de masas.
Animation eines Einkristalls in Diamantstruktur (Silicium, Germanium). Unter bestimmten Drehungswinkeln ist die Ausbildung von „Kanälen“ zu beobachten, so dass an diesen Stellen durch den Kristall gesehen werden kann bzw. Ionen nahezu ungestört durch den Kristall gelangen können.

离子注入是一种将特定离子在电场里加速,然后嵌入到另一固体材料之中的技术手段。使用这个技术可以改变固体材料的物理化学性质,现在已经广泛应用于半导体器件制造和某些材料科学研究。离子注入可以导致核转变,或改变某些固体材料的晶体结构。

英语百科

Ion implantation 离子注入

(重定向自SIMOX)
An ion implantation system at LAAS technological facility in Toulouse, France.
Ion implantation setup with mass separator
Animation eines Einkristalls in Diamantstruktur (Silicium, Germanium). Unter bestimmten Drehungswinkeln ist die Ausbildung von „Kanälen“ zu beobachten, so dass an diesen Stellen durch den Kristall gesehen werden kann bzw. Ionen nahezu ungestört durch den Kristall gelangen können.

Ion implantation is a materials engineering process by which ions of a material are accelerated in an electrical field and impacted into a solid. This process is used to change the physical, chemical, or electrical properties of the solid. Ion implantation is used in semiconductor device fabrication and in metal finishing, as well as various applications in materials science research. The ions alter the elemental composition of the target (if the ions differ in composition from the target), stopping in the target and staying there. They also cause many chemical and physical changes in the target by transferring their energy and momentum to the electrons and atomic nuclei of the target material. This causes a structural change, in that the crystal structure of the target can be damaged or even destroyed by the energetic collision cascades. Because the ions have masses comparable to those of the target atoms, they knock the target atoms out of place more than electron beams do. If the ion energy is sufficiently high (usually tens of MeV) to overcome the coulomb barrier, there can even be a small amount of nuclear transmutation.

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