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词汇 Thermal oxidation
分类 英语词汇 英语翻译词典
释义

Thermal oxidation

英语百科

Thermal oxidation

Furnaces used for diffusion and thermal oxidation at LAAS technological facility in Toulouse, France.

In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The rate of oxide growth is often predicted by the Deal-Grove model. Thermal oxidation may be applied to different materials, but this article will only consider oxidation of silicon substrates to produce silicon dioxide.

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