Helium mass spectrometer
（重定向自Helium leak detector）
A helium mass spectrometer is an instrument commonly used to detect and locate small leaks. It was initially developed in the Manhattan Project during World War II to find extremely small leaks in the gas diffusion process of uranium enrichment plants. It typically uses a vacuum chamber in which a sealed container filled with helium is placed. Helium leaks out of the container, and the rate of the leak is detected by a mass spectrometer.